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VUV & UV PL Phospor
  • 작성자 관리자
  • 조회수 936
2022-12-21 13:31:14


■   Application
- VUV Phospor

- LED Phospor, PDP Phospor
 
■   System Configuration

- Spectrometer(DARSA-5200)

- Light Source : Excimer source(146nm), Hg-Lamp(254nm)

- TMP & Rotary Pumping system

- S/W : DarsaPro70, DarsaPL

- Interface & Communication function for other device lin


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